JPH0616922Y2 - Ｃｖｄ装置 - Google Patents

Ｃｖｄ装置

Info

Publication number
JPH0616922Y2
JPH0616922Y2 JP1988022912U JP2291288U JPH0616922Y2 JP H0616922 Y2 JPH0616922 Y2 JP H0616922Y2 JP 1988022912 U JP1988022912 U JP 1988022912U JP 2291288 U JP2291288 U JP 2291288U JP H0616922 Y2 JPH0616922 Y2 JP H0616922Y2
Authority
JP
Japan
Prior art keywords
susceptor
work coil
gold
heat dissipation
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988022912U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01129260U (en]
Inventor
英治 柴田
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1988022912U priority Critical patent/JPH0616922Y2/ja
Publication of JPH01129260U publication Critical patent/JPH01129260U/ja
Application granted granted Critical
Publication of JPH0616922Y2 publication Critical patent/JPH0616922Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1988022912U 1988-02-22 1988-02-22 Ｃｖｄ装置 Expired - Lifetime JPH0616922Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988022912U JPH0616922Y2 (ja) 1988-02-22 1988-02-22 Ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988022912U JPH0616922Y2 (ja) 1988-02-22 1988-02-22 Ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH01129260U JPH01129260U (en]) 1989-09-04
JPH0616922Y2 true JPH0616922Y2 (ja) 1994-05-02

Family

ID=31241450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988022912U Expired - Lifetime JPH0616922Y2 (ja) 1988-02-22 1988-02-22 Ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0616922Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013145859A (ja) * 2011-12-16 2013-07-25 Stanley Electric Co Ltd 半導体製造装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636725A (ja) * 1986-06-26 1988-01-12 Toshiba Corp ジヤイロトロン

Also Published As

Publication number Publication date
JPH01129260U (en]) 1989-09-04

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